Inventor

UEMURA MITSUO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “UEMURA MITSUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUK CO LTD

2 patents

US9987838B2Jun 5, 2018

Method and device for separating workpiece consisting of carrier substrate and resin layer

FUK CO LTD3 citations61

US8919406B2Dec 30, 2014

Bonding apparatus

FUK CO LTD0 citations29

SHARP KK

1 patent

US6671918B2Jan 6, 2004

Substrate cleaning apparatus

SHARP KK5 citations54