Inventor
ZENG AIJUN
CN7 patents
⚠️ This page may combine multiple inventors who share the name “ZENG AIJUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHANGHAI INST OPTICS & FINE MECH CAS
4 patentsUS11726407B2Aug 15, 2023
Integrated super-resolution laser direct-writing device and direct-writing method
SHANGHAI INST OPTICS & FINE MECH CAS0 citations43
US9804502B2Oct 31, 2017
Illumination device and method for using the same in the projection lithography machine
SHANGHAI INST OPTICS & FINE MECH CAS0 citations38
US9709896B2Jul 18, 2017
Illumination system for lithographic projection exposure step-and-scan apparatus
SHANGHAI INST OPTICS & FINE MECH CAS0 citations35
US9400433B2Jul 26, 2016
Lithography illumination system
SHANGHAI INST OPTICS & FINE MECH CAS0 citations32
SHANGHAI INST OPTICS & FINE ME
2 patentsUS9297744B2Mar 29, 2016
Device and method for measuring phase retardation distribution and fast axis azimuth angle distribution in real time
SHANGHAI INST OPTICS & FINE ME3 citations65
US9323052B2Apr 26, 2016
Lithography pupil shaping optical system and method for generating off-axis illumination mode
SHANGHAI INST OPTICS & FINE ME0 citations37