Inventor
ODA YOUHEI
JP5 patents
Patents
5 patentsUS9299576B2Mar 29, 2016
Method of plasma etching a trench in a semiconductor substrate
DENSO CORP6 citations69
US12080792B2Sep 3, 2024
Semiconductor device and method for manufacturing same
DENSO CORP0 citations48
US8673749B2Mar 18, 2014
Semiconductor device manufacturing method
DENSO CORP1 citations48
US10403709B2Sep 3, 2019
Method for manufacturing semiconductor device
DENSO CORP0 citations38
US9496331B2Nov 15, 2016
Semiconductor device having vertical MOSFET with super junction structure, and method for manufacturing the same
DENSO CORP0 citations36