Inventor
AKIYAMA HIROTERU
JP6 patents
⚠️ This page may combine multiple inventors who share the name “AKIYAMA HIROTERU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
4 patentsUS9922415B2Mar 20, 2018
Inspection method, inspection apparatus, and inspection system
NUFLARE TECHNOLOGY INC6 citations71
US10540561B2Jan 21, 2020
Inspection method and inspection apparatus
NUFLARE TECHNOLOGY INC2 citations70
US9165355B1Oct 20, 2015
Inspection method
NUFLARE TECHNOLOGY INC2 citations60
US11145050B2Oct 12, 2021
Pattern inspection apparatus and pattern inspection method
NUFLARE TECHNOLOGY INC0 citations49