Inventor

OKON THOMAS

DE4 patents

⚠️ This page may combine multiple inventors who share the name “OKON THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

2 patents

US10281824B2May 7, 2019

Microlithography projection objective

ZEISS CARL SMT GMBH0 citations51

US9097984B2Aug 4, 2015

Microlithography projection objective

ZEISS CARL SMT GMBH1 citations51

ULRICH WILHELM

2 patents

US8659744B2Feb 25, 2014

Method for correcting a lithography projection objective, and such a projection objective

ULRICH WILHELM0 citations45

US8174676B2May 8, 2012

Method for correcting a lithography projection objective, and such a projection objective

ULRICH WILHELM1 citations45