Inventor
SANO YUKIO
JP6 patents
⚠️ This page may combine multiple inventors who share the name “SANO YUKIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUSD766850SSep 20, 2016
Wafer holder for manufacturing semiconductor
TOKYO ELECTRON LTD8 citations81
US11390944B2Jul 19, 2022
Film-forming device and method for cleaning same
TOKYO ELECTRON LTD3 citations69
US12065732B2Aug 20, 2024
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations48