Inventor
LEE WON SOON
KR2 patents
Patents
2 patentsUS6074930AJun 13, 2000
Method for forming a trench isolation structure comprising an interface treatment for trench liner and a subsequent annealing process
SAMSUNG ELECTRONICS CO LTD33 citations89
US7560712B2Jul 14, 2009
Ion implanter with etch prevention member(s)
SAMSUNG ELECTRONICS CO LTD13 citations80