Inventor
HUANG ZHUANGXIONG
NL7 patents
⚠️ This page may combine multiple inventors who share the name “HUANG ZHUANGXIONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS12346031B2Jul 1, 2025
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations61
US12292696B2May 6, 2025
Fluid purging system, projection system, illumination system, lithographic apparatus, and method
ASML NETHERLANDS BV0 citations53
US11703768B2Jul 18, 2023
Lithographic apparatus and related methods
ASML NETHERLANDS BV0 citations52
US12411425B2Sep 9, 2025
Fluid purging system
ASML NETHERLANDS BV0 citations38
ASML HOLDING NV
2 patentsUS12158705B2Dec 3, 2024
End-of-life monitoring of dynamic gas lock membranes and pupil facet mirrors and detection of membrane rupture in lithographic apparatuses
ASML HOLDING NV0 citations55
US12332570B2Jun 17, 2025
Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris
ASML HOLDING NV0 citations54