Inventor

OHTO KOUICHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “OHTO KOUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NEC ELECTRONICS CORP

2 patents

US7420279B2Sep 2, 2008

Carbon containing silicon oxide film having high ashing tolerance and adhesion

NEC ELECTRONICS CORP13 citations81

US7102236B2Sep 5, 2006

Carbon containing silicon oxide film having high ashing tolerance and adhesion

NEC ELECTRONICS CORP6 citations70

NEC CORP

1 patent

US6124213ASep 26, 2000

Process of fabricating semiconductor device having ashing step for photo-resist mask in plasma produced from Nx Hy gas

NEC CORP27 citations91