Inventor
KITOO MAKOTO
JP3 patents
Patents
3 patentsUS4560641ADec 24, 1985
Method for forming fine multilayer resist patterns
HITACHI LTD22 citations80
US4629547ADec 16, 1986
Process for forming protective film of organic polymer and boron
HITACHI LTD15 citations71
US4529651AJul 16, 1985
Magnetic recording medium having organic protective overlayer
HITACHI LTD15 citations71