Inventor
HARA HIDEAKI
JP43 patents
⚠️ This page may combine multiple inventors who share the name “HARA HIDEAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
19 patentsUS5959732ASep 28, 1999
Stage apparatus and a stage control method
NIKON CORP46 citations96
US5839324ANov 24, 1998
Stage apparatus and exposure apparatus provided with the stage apparatus
NIKON CORP47 citations96
US7847916B2Dec 7, 2010
Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
NIKON CORP12 citations92
US7826031B2Nov 2, 2010
Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
NIKON CORP21 citations92
US7480029B2Jan 20, 2009
Exposure apparatus and method for manufacturing device
NIKON CORP27 citations92
US6172373B1Jan 9, 2001
Stage apparatus with improved positioning capability
NIKON CORP44 citations92
US6158298ADec 12, 2000
Stage apparatus and exposure apparatus provided with the stage apparatus
NIKON CORP33 citations92
US9821469B2Nov 21, 2017
Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device
NIKON CORP5 citations84
US6407799B2Jun 18, 2002
Stage control method using a temperature
NIKON CORP9 citations74
US9411248B2Aug 9, 2016
Exposure apparatus and device fabrication method
NIKON CORP2 citations63
US9046790B2Jun 2, 2015
Exposure apparatus and device fabrication method
NIKON CORP1 citations63
US11511438B2Nov 29, 2022
Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device
NIKON CORP0 citations62
US11097426B2Aug 24, 2021
Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device
NIKON CORP0 citations62
US10744648B2Aug 18, 2020
Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device
NIKON CORP0 citations52
US10384350B2Aug 20, 2019
Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device
NIKON CORP0 citations52
US10126661B2Nov 13, 2018
Exposure apparatus and device fabrication method
NIKON CORP0 citations52
US10081108B2Sep 25, 2018
Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device
NIKON CORP0 citations52
US10012909B2Jul 3, 2018
Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
NIKON CORP0 citations52
US8867017B2Oct 21, 2014
Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
NIKON CORP0 citations52
HARA HIDEAKI
10 patentsUS9114070B2Aug 25, 2015
Liposome for delivery to posterior segment of eye and pharmaceutical composition for disease in posterior segment of eye
HARA HIDEAKI8 citations84
US8169590B2May 1, 2012
Exposure apparatus and device fabrication method
HARA HIDEAKI4 citations73
US8111373B2Feb 7, 2012
Exposure apparatus and device fabrication method
HARA HIDEAKI4 citations73
US9041901B2May 26, 2015
Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
HARA HIDEAKI2 citations62
US8411248B2Apr 2, 2013
Exposure apparatus and device fabrication method
HARA HIDEAKI2 citations62
US8854599B2Oct 7, 2014
Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
HARA HIDEAKI0 citations52
US8537331B2Sep 17, 2013
Exposure apparatus and method for manufacturing device
HARA HIDEAKI0 citations52
US8111375B2Feb 7, 2012
Exposure apparatus and method for manufacturing device
HARA HIDEAKI0 citations52
US8703433B2Apr 22, 2014
Marker for amyotrophic lateral sclerosis, and use thereof
HARA HIDEAKI1 citations48
US9223224B2Dec 29, 2015
Exposure apparatus with component from which liquid is protected and/or removed and device fabricating method
HARA HIDEAKI0 citations41