Inventor
NOGUCHI MIYOKO
JP10 patents
Patents
10 patentsUS5305054AApr 19, 1994
Imaging method for manufacture of microdevices
CANON KK124 citations98
US6128068AOct 3, 2000
Projection exposure apparatus including an illumination optical system that forms a secondary light source with a particular intensity distribution
CANON KK52 citations96
US5673102ASep 30, 1997
Image farming and microdevice manufacturing method and exposure apparatus in which a light source includes four quadrants of predetermined intensity
CANON KK74 citations96
US6084655AJul 4, 2000
Imaging method for manufacture of microdevices
CANON KK24 citations92
US5587834ADec 24, 1996
Semiconductor device manufacturing method and projection exposure apparatus using the same
CANON KK27 citations92
US5436692AJul 25, 1995
Projection exposure apparatus and semiconductor device manufacturing method
CANON KK34 citations92
US5424803AJun 13, 1995
Projection exposure apparatus and semiconductor device manufacturing method
CANON KK26 citations92
US6271909B1Aug 7, 2001
Exposure apparatus and device manufacturing method including changing a photo-intensity distribution of a light source and adjusting an illuminance distribution on a substrate in accordance with the change
CANON KK13 citations82
US6473160B2Oct 29, 2002
Projection exposure apparatus and device manufacturing method including an aperture member having a circular light transmitting portion and a light blocking member
CANON KK7 citations73
US6107007AAug 22, 2000
Lithography process
CANON KK10 citations73