Inventor
LUE BRIAN
US22 patents
⚠️ This page may combine multiple inventors who share the name “LUE BRIAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
18 patentsUS6108189AAug 22, 2000
Electrostatic chuck having improved gas conduits
APPLIED MATERIALS INC255 citations99
US6721162B2Apr 13, 2004
Electrostatic chuck having composite dielectric layer and method of manufacture
APPLIED MATERIALS INC76 citations98
US6170428B1Jan 9, 2001
Symmetric tunable inductively coupled HDP-CVD reactor
APPLIED MATERIALS INC430 citations98
US6077357AJun 20, 2000
Orientless wafer processing on an electrostatic chuck
APPLIED MATERIALS INC105 citations98
US5761023AJun 2, 1998
Substrate support with pressure zones having reduced contact area and temperature feedback
APPLIED MATERIALS INC218 citations98
US5720818AFeb 24, 1998
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
APPLIED MATERIALS INC150 citations98
US7925377B2Apr 12, 2011
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC45 citations97
US6264467B1Jul 24, 2001
Micro grooved support surface for reducing substrate wear and slip formation
APPLIED MATERIALS INC547 citations97
US7743728B2Jun 29, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC36 citations96
US7694647B2Apr 13, 2010
Cluster tool architecture for processing a substrate
APPLIED MATERIALS INC42 citations96
US6414834B1Jul 2, 2002
Dielectric covered electrostatic chuck
APPLIED MATERIALS INC56 citations96
US5904776AMay 18, 1999
Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck
APPLIED MATERIALS INC52 citations96
US5876119AMar 2, 1999
In-situ substrate temperature measurement scheme in plasma reactor
APPLIED MATERIALS INC58 citations96
US5748434AMay 5, 1998
Shield for an electrostatic chuck
APPLIED MATERIALS INC91 citations96
US6175485B1Jan 16, 2001
Electrostatic chuck and method for fabricating the same
APPLIED MATERIALS INC18 citations92
US5715132AFeb 3, 1998
Method and structure for improving gas breakdown resistance and reducing the potential of arcing in an electrostatic chuck
APPLIED MATERIALS INC30 citations92
US5644467AJul 1, 1997
Method and structure for improving gas breakdown resistance and reducing the potential of arcing in a electrostatic chuck
APPLIED MATERIALS INC30 citations92
US6667527B2Dec 23, 2003
Temperature sensor with shell
APPLIED MATERIALS INC17 citations84