Inventor
WU SHUN JACKSON
US7 patents
⚠️ This page may combine multiple inventors who share the name “WU SHUN JACKSON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6659331B2Dec 9, 2003
Plasma-resistant, welded aluminum structures for use in semiconductor apparatus
APPLIED MATERIALS INC30 citations92
US6175485B1Jan 16, 2001
Electrostatic chuck and method for fabricating the same
APPLIED MATERIALS INC18 citations92
US7048814B2May 23, 2006
Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus
APPLIED MATERIALS INC16 citations83
US7033447B2Apr 25, 2006
Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus
APPLIED MATERIALS INC8 citations73
US7055732B2Jun 6, 2006
Semiconductor processing apparatus including plasma-resistant, welded aluminum structures
APPLIED MATERIALS INC4 citations62