Inventor
DEBOER MAARTEN P
US3 patents
Patents
3 patentsUS6721094B1Apr 13, 2004
Long working distance interference microscope
SANDIA CORP272 citations96
US6567715B1May 20, 2003
Method and system for automated on-chip material and structural certification of MEMS devices
SANDIA CORP102 citations96
US6446486B1Sep 10, 2002
Micromachine friction test apparatus
SANDIA CORP53 citations89