Inventor
DAHIMENE MAHMOUD
US11 patents
⚠️ This page may combine multiple inventors who share the name “DAHIMENE MAHMOUD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS6198616B1Mar 6, 2001
Method and apparatus for supplying a chucking voltage to an electrostatic chuck within a semiconductor wafer processing system
APPLIED MATERIALS INC271 citations98
US7316761B2Jan 8, 2008
Apparatus for uniformly etching a dielectric layer
APPLIED MATERIALS INC178 citations97
US6921727B2Jul 26, 2005
Method for modifying dielectric characteristics of dielectric layers
APPLIED MATERIALS INC61 citations94
US5737177AApr 7, 1998
Apparatus and method for actively controlling the DC potential of a cathode pedestal
APPLIED MATERIALS INC93 citations93
US6273958B2Aug 14, 2001
Substrate support for plasma processing
APPLIED MATERIALS INC20 citations92
US6005376ADec 21, 1999
DC power supply
APPLIED MATERIALS INC22 citations92
US7374636B2May 20, 2008
Method and apparatus for providing uniform plasma in a magnetic field enhanced plasma reactor
APPLIED MATERIALS INC21 citations91