Inventor

MUITJENS MARCEL JOHANNUS ELISA

NL2 patents

Patents

2 patents

US7542127B2Jun 2, 2009

Lithographic apparatus and method for manufacturing a device

ASML NETHERLANDS BV7 citations71

US7342237B2Mar 11, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV4 citations56