Inventor

TOBE YASUHIRO

JP7 patents

⚠️ This page may combine multiple inventors who share the name “TOBE YASUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents

US10840069B2Nov 17, 2020

Plasma processing apparatus and plasma control method

TOKYO ELECTRON LTD1 citations61

US10651071B2May 12, 2020

Substrate processing apparatus and substrate removing method

TOKYO ELECTRON LTD1 citations59

US10804082B2Oct 13, 2020

Substrate processing apparatus, and operation method for substrate processing apparatus

TOKYO ELECTRON LTD0 citations38

TOBE YASUHIRO

2 patents

US8522958B2Sep 3, 2013

Vacuum processing apparatus

TOBE YASUHIRO6 citations66

US8337621B2Dec 25, 2012

Substrate processing apparatus

TOBE YASUHIRO0 citations36

ASM JAPAN

1 patent

US7381291B2Jun 3, 2008

Dual-chamber plasma processing apparatus

ASM JAPAN24 citations91

ISHIKAWA HIRAKU

1 patent

US8262844B2Sep 11, 2012

Plasma processing apparatus, plasma processing method and storage medium

ISHIKAWA HIRAKU3 citations60