Inventor
CHIU HO-MAN RODNEY
US7 patents
⚠️ This page may combine multiple inventors who share the name “CHIU HO-MAN RODNEY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6807972B2Oct 26, 2004
Gutter and splash-guard for protecting a wafer during transfer from a single wafer cleaning chamber
APPLIED MATERIALS INC13 citations83
US7985379B2Jul 26, 2011
Reactor design to reduce particle deposition during process abatement
APPLIED MATERIALS INC15 citations82
US7736599B2Jun 15, 2010
Reactor design to reduce particle deposition during process abatement
APPLIED MATERIALS INC13 citations82
US7682574B2Mar 23, 2010
Safety, monitoring and control features for thermal abatement reactor
APPLIED MATERIALS INC11 citations82
US7201808B2Apr 10, 2007
Method and apparatus for rotating a semiconductor substrate
APPLIED MATERIALS INC4 citations61