Inventor
SAIKI KENTA
JP4 patents
Patents
4 patentsUS11639947B2May 2, 2023
Method of detecting foreign object on stage and detection apparatus
TOKYO ELECTRON LTD0 citations47
US10074192B2Sep 11, 2018
Substrate inspection apparatus and control method thereof
TOKYO ELECTRON LTD0 citations35
US10006941B2Jun 26, 2018
Position accuracy inspecting method, position accuracy inspecting apparatus, and position inspecting unit
TOKYO ELECTRON LTD0 citations34
US10310010B2Jun 4, 2019
Probe apparatus and probe method
TOKYO ELECTRON LTD0 citations32