Inventor
MATSUYAMA NOBORU
JP4 patents
⚠️ This page may combine multiple inventors who share the name “MATSUYAMA NOBORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOYOTA AUTO BODY CO LTD
2 patentsTOKYO ELECTRON LTD
2 patentsUS11808696B2Nov 7, 2023
Substrate processing apparatus and substrate processing method to suppress alteration of processing liquid
TOKYO ELECTRON LTD0 citations57
US11360019B2Jun 14, 2022
Substrate processing apparatus, substrate processing method, and computer-readable recording medium using color information of processing liquid of substrate
TOKYO ELECTRON LTD0 citations57