Inventor
OLSTAD MARK
US3 patents
Patents
3 patentsUS10872771B2Dec 22, 2020
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
ASM IP HOLDING BV4 citations70
US11501973B2Nov 15, 2022
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
ASM IP HOLDING BV0 citations59
US12467140B2Nov 11, 2025
Showerhead assembly and components
ASM IP HOLDING BV0 citations47