Inventor
JOHNSON WARD
US10 patents
Patents
10 patentsUS11056567B2Jul 6, 2021
Method of forming a doped metal carbide film on a substrate and related semiconductor device structures
ASM IP HOLDING BV3 citations71
US10847371B2Nov 24, 2020
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
ASM IP HOLDING BV2 citations71
US10829852B2Nov 10, 2020
Gas distribution device for a wafer processing apparatus
ASM IP HOLDING BV2 citations71
US10872771B2Dec 22, 2020
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
ASM IP HOLDING BV4 citations70
US11837483B2Dec 5, 2023
Wafer handling chamber with moisture reduction
ASM IP HOLDING BV0 citations61
US11270899B2Mar 8, 2022
Wafer handling chamber with moisture reduction
ASM IP HOLDING BV0 citations61
US12020938B2Jun 25, 2024
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
ASM IP HOLDING BV0 citations60
US11398382B2Jul 26, 2022
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
ASM IP HOLDING BV0 citations60
US11501973B2Nov 15, 2022
Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures
ASM IP HOLDING BV0 citations59
US12518970B2Jan 6, 2026
Methods for depositing a titanium aluminum carbide film structure on a substrate and related semiconductor structures
ASM IP HOLDING BV0 citations51