Inventor
ZHURIN VIACHESLAV V
US14 patents
⚠️ This page may combine multiple inventors who share the name “ZHURIN VIACHESLAV V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAUFMAN & ROBINSON INC
6 patentsUS6750600B2Jun 15, 2004
Hall-current ion source
KAUFMAN & ROBINSON INC51 citations92
US6238537B1May 29, 2001
Ion assisted deposition source
KAUFMAN & ROBINSON INC48 citations92
US6454910B1Sep 24, 2002
Ion-assisted magnetron deposition
KAUFMAN & ROBINSON INC41 citations89
US6724160B2Apr 20, 2004
Ion-source neutralization with a hot-filament cathode-neutralizer
KAUFMAN & ROBINSON INC19 citations83
US6682634B1Jan 27, 2004
Apparatus for sputter deposition
KAUFMAN & ROBINSON INC10 citations72
US6843891B2Jan 18, 2005
Apparatus for sputter deposition
KAUFMAN & ROBINSON INC4 citations61