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Inventor

KAUFMAN HAROLD R

US38 patents
⚠️ This page may combine multiple inventors who share the name “KAUFMAN HAROLD R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAUFMAN & ROBINSON INC

16 patents
US5274306ADec 28, 1993

Capacitively coupled radiofrequency plasma source

KAUFMAN & ROBINSON INC57 citations95
US4684848AAug 4, 1987

Broad-beam electron source

KAUFMAN & ROBINSON INC105 citations95
US6750600B2Jun 15, 2004

Hall-current ion source

KAUFMAN & ROBINSON INC51 citations92
US6608431B1Aug 19, 2003

Modular gridless ion source

KAUFMAN & ROBINSON INC45 citations92
US6870164B1Mar 22, 2005

Pulsed operation of hall-current ion sources

KAUFMAN & ROBINSON INC20 citations91
US6454910B1Sep 24, 2002

Ion-assisted magnetron deposition

KAUFMAN & ROBINSON INC41 citations89
US6724160B2Apr 20, 2004

Ion-source neutralization with a hot-filament cathode-neutralizer

KAUFMAN & ROBINSON INC19 citations83
US6864485B2Mar 8, 2005

Ion optics with shallow dished grids

KAUFMAN & ROBINSON INC13 citations79
US6246162B1Jun 12, 2001

Ion optics

KAUFMAN & ROBINSON INC10 citations73
US6682634B1Jan 27, 2004

Apparatus for sputter deposition

KAUFMAN & ROBINSON INC10 citations72
US10068739B2Sep 4, 2018

End-hall ion source with enhanced radiation cooling

KAUFMAN & ROBINSON INC4 citations70
US7667379B2Feb 23, 2010

Industrial hollow cathode with radiation shield structure

KAUFMAN & ROBINSON INC6 citations62
US5793195AAug 11, 1998

Angular distribution probe

KAUFMAN & ROBINSON INC3 citations62
US6843891B2Jan 18, 2005

Apparatus for sputter deposition

KAUFMAN & ROBINSON INC4 citations61
US7728498B2Jun 1, 2010

Industrial hollow cathode

KAUFMAN & ROBINSON INC2 citations56
US7843138B2Nov 30, 2010

Power supply for a hot-filament cathode

KAUFMAN & ROBINSON INC0 citations52

IBM

8 patents

KAUFMAN HAROLD R

7 patents

FRONT RANGE FAKEL INC

3 patents

ION TECH INC

3 patents

ADVANCED ENERGY IND INC

1 patent