Inventor
KAUFMAN HAROLD R
US38 patents
⚠️ This page may combine multiple inventors who share the name “KAUFMAN HAROLD R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAUFMAN & ROBINSON INC
16 patentsUS5274306ADec 28, 1993
Capacitively coupled radiofrequency plasma source
KAUFMAN & ROBINSON INC57 citations95
US4684848AAug 4, 1987
Broad-beam electron source
KAUFMAN & ROBINSON INC105 citations95
US6750600B2Jun 15, 2004
Hall-current ion source
KAUFMAN & ROBINSON INC51 citations92
US6608431B1Aug 19, 2003
Modular gridless ion source
KAUFMAN & ROBINSON INC45 citations92
US6870164B1Mar 22, 2005
Pulsed operation of hall-current ion sources
KAUFMAN & ROBINSON INC20 citations91
US6454910B1Sep 24, 2002
Ion-assisted magnetron deposition
KAUFMAN & ROBINSON INC41 citations89
US6724160B2Apr 20, 2004
Ion-source neutralization with a hot-filament cathode-neutralizer
KAUFMAN & ROBINSON INC19 citations83
US6864485B2Mar 8, 2005
Ion optics with shallow dished grids
KAUFMAN & ROBINSON INC13 citations79
US6246162B1Jun 12, 2001
Ion optics
KAUFMAN & ROBINSON INC10 citations73
US6682634B1Jan 27, 2004
Apparatus for sputter deposition
KAUFMAN & ROBINSON INC10 citations72
US10068739B2Sep 4, 2018
End-hall ion source with enhanced radiation cooling
KAUFMAN & ROBINSON INC4 citations70
US7667379B2Feb 23, 2010
Industrial hollow cathode with radiation shield structure
KAUFMAN & ROBINSON INC6 citations62
US5793195AAug 11, 1998
Angular distribution probe
KAUFMAN & ROBINSON INC3 citations62
US6843891B2Jan 18, 2005
Apparatus for sputter deposition
KAUFMAN & ROBINSON INC4 citations61
US7728498B2Jun 1, 2010
Industrial hollow cathode
KAUFMAN & ROBINSON INC2 citations56
US7843138B2Nov 30, 2010
Power supply for a hot-filament cathode
KAUFMAN & ROBINSON INC0 citations52
IBM
8 patentsUS4588490AMay 13, 1986
Hollow cathode enhanced magnetron sputter device
IBM133 citations96
US4523971AJun 18, 1985
Programmable ion beam patterning system
IBM75 citations96
US4633129ADec 30, 1986
Hollow cathode
IBM50 citations93
US4446403AMay 1, 1984
Compact plug connectable ion source
IBM43 citations92
US4259145AMar 31, 1981
Ion source for reactive ion etching
IBM47 citations92
US4419203ADec 6, 1983
Apparatus and method for neutralizing ion beams
IBM37 citations91
US4541890ASep 17, 1985
Hall ion generator for working surfaces with a low energy high intensity ion beam
IBM26 citations82
US4471224ASep 11, 1984
Apparatus and method for generating high current negative ions
IBM13 citations74
KAUFMAN HAROLD R
7 patentsUS4862032AAug 29, 1989
End-Hall ion source
KAUFMAN HAROLD R204 citations98
US4481062ANov 6, 1984
Electron bombardment ion sources
KAUFMAN HAROLD R55 citations95
US4873467AOct 10, 1989
Ion source with particular grid assembly
KAUFMAN HAROLD R54 citations92
US8994258B1Mar 31, 2015
End-hall ion source with enhanced radiation cooling
KAUFMAN HAROLD R7 citations80
US5154635AOct 13, 1992
Coaxial vacuum cable
KAUFMAN HAROLD R10 citations73
US4954751ASep 4, 1990
Radio frequency hollow cathode
KAUFMAN HAROLD R14 citations73
US8698401B2Apr 15, 2014
Mitigation of plasma-inductor termination
KAUFMAN HAROLD R0 citations41
FRONT RANGE FAKEL INC
3 patentsUS5763989AJun 9, 1998
Closed drift ion source with improved magnetic field
FRONT RANGE FAKEL INC119 citations97
US6456011B1Sep 24, 2002
Magnetic field for small closed-drift ion source
FRONT RANGE FAKEL INC39 citations84
US6323586B1Nov 27, 2001
Closed drift hollow cathode
FRONT RANGE FAKEL INC10 citations72
ION TECH INC
3 patentsUS3969646AJul 13, 1976
Electron-bombardment ion source including segmented anode of electrically conductive, magnetic material
ION TECH INC36 citations89
US3956666AMay 11, 1976
Electron-bombardment ion sources
ION TECH INC33 citations89
US3952228AApr 20, 1976
Electron-bombardment ion source including alternating potential means for cyclically varying the focussing of ion beamlets
ION TECH INC18 citations71