Inventor
KAHN JAMES R
US17 patents
⚠️ This page may combine multiple inventors who share the name “KAHN JAMES R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KAUFMAN & ROBINSON INC
13 patentsUS6750600B2Jun 15, 2004
Hall-current ion source
KAUFMAN & ROBINSON INC51 citations92
US6238537B1May 29, 2001
Ion assisted deposition source
KAUFMAN & ROBINSON INC48 citations92
US6454910B1Sep 24, 2002
Ion-assisted magnetron deposition
KAUFMAN & ROBINSON INC41 citations89
US6724160B2Apr 20, 2004
Ion-source neutralization with a hot-filament cathode-neutralizer
KAUFMAN & ROBINSON INC19 citations83
US6864485B2Mar 8, 2005
Ion optics with shallow dished grids
KAUFMAN & ROBINSON INC13 citations79
US6246162B1Jun 12, 2001
Ion optics
KAUFMAN & ROBINSON INC10 citations73
US6682634B1Jan 27, 2004
Apparatus for sputter deposition
KAUFMAN & ROBINSON INC10 citations72
US10068739B2Sep 4, 2018
End-hall ion source with enhanced radiation cooling
KAUFMAN & ROBINSON INC4 citations70
US7667379B2Feb 23, 2010
Industrial hollow cathode with radiation shield structure
KAUFMAN & ROBINSON INC6 citations62
US5793195AAug 11, 1998
Angular distribution probe
KAUFMAN & ROBINSON INC3 citations62
US6843891B2Jan 18, 2005
Apparatus for sputter deposition
KAUFMAN & ROBINSON INC4 citations61
US7728498B2Jun 1, 2010
Industrial hollow cathode
KAUFMAN & ROBINSON INC2 citations56
US7843138B2Nov 30, 2010
Power supply for a hot-filament cathode
KAUFMAN & ROBINSON INC0 citations52