Inventor

HONG TU

US3 patents

Patents

3 patents

US12565701B2Mar 3, 2026

Undercoating coverage and resistance control for ESCS of substrate processing systems

LAM RES CORP0 citations59

US12500114B2Dec 16, 2025

Wafer lift pin mechanism for preventing local backside deposition

LAM RES CORP0 citations57

US12014921B2Jun 18, 2024

Plasma enhanced wafer soak for thin film deposition

LAM RES CORP0 citations57