Inventor
ISHIGURO KOUJI
JP10 patents
⚠️ This page may combine multiple inventors who share the name “ISHIGURO KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
4 patentsUS6084356AJul 4, 2000
Plasma processing apparatus with a dielectric body in the waveguide
HITACHI LTD87 citations96
US6196155B1Mar 6, 2001
Plasma processing apparatus and method of cleaning the apparatus
HITACHI LTD65 citations95
US5753923AMay 19, 1998
Ion injection device and method therefor
HITACHI LTD78 citations95
US5260542ANov 9, 1993
Laser Marking apparatus
HITACHI LTD35 citations92