Inventor
TSUCHIKAWA HARUO
JP5 patents
Patents
5 patentsUS4586141AApr 29, 1986
Method and apparatus for an electron beam exposure system
FUJITSU LTD28 citations92
US4585943AApr 29, 1986
Electron beam exposure apparatus
FUJITSU LTD9 citations72
US4516030AMay 7, 1985
Scanning electron beam exposure system
FUJITSU LTD10 citations72
US4968893ANov 6, 1990
Scanning electron beam exposure system
FUJITSU LTD6 citations61
US4583077AApr 15, 1986
Deflection system in an electron beam exposure device
FUJITSU LTD3 citations61