Inventor · disambiguated record
Bunei Hamasaki
Also filed as: HAMASAKI BUNEI
10 granted patents·305 citations·filing 1985–1999
91Inventor score
Files withCANON KK10
Top patents by PatentIndex Score
10 records- 0192US4937618AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1989·Granted Jun 26, 1990·57 cites·3 claims
- 0289US4677474AWafer proberCANON KK·Filed 1985·Granted Jun 30, 1987·92 cites·12 claims
- 0379US5050111AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1990·Granted Sep 17, 1991·31 cites·7 claims
- 0479US4918320AAlignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignmentCANON KK·Filed 1988·Granted Apr 17, 1990·33 cites·13 claims
- 0563US4801808AAlignment and exposure apparatus having an objective lens system capable of observing a mark on an exposure optical holding member to permit alignment of a mask relative to the exposure optical systemCANON KK·Filed 1987·Granted Jan 31, 1989·16 cites·13 claims
- 0662US6499007B1Parameter editing method and semiconductor exposure systemCANON KK·Filed 1999·Granted Dec 24, 2002·22 cites·20 claims
- 0757US5365342AAlignment and exposure apparatus and method for manufacture of integrated circuitsCANON KK·Filed 1993·Granted Nov 15, 1994·28 cites·21 claims
- 0855US4811059AAlignment methodCANON KK·Filed 1987·Granted Mar 7, 1989·12 cites·9 claims
- 0944US5197118AControl system for a fine pattern printing apparatusCANON KK·Filed 1991·Granted Mar 23, 1993·7 cites·18 claims
- 1044US4881100AAlignment methodCANON KK·Filed 1988·Granted Nov 14, 1989·7 cites·9 claims
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