Inventor

DOUKI KATSUJI

US3 patents

Patents

3 patents

US6753124B2Jun 22, 2004

Radiation-sensitive resin composition

JSR CORP33 citations91

US6482568B1Nov 19, 2002

Radiation-sensitive resin composition

JSR CORP28 citations91

US6171750B1Jan 9, 2001

Radiation-sensitive resin composition

JSR CORP10 citations68