P

Inventor

TAKAGI KEN-ICHI

JP9 patents
⚠️ This page may combine multiple inventors who share the name “TAKAGI KEN-ICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANELVA CORP

6 patents
US5891349AApr 6, 1999

Plasma enhanced CVD apparatus and process, and dry etching apparatus and process

ANELVA CORP308 citations98
US5721021AFeb 24, 1998

Method of depositing titanium-containing conductive thin film

ANELVA CORP62 citations95
US5681393AOct 28, 1997

Plasma processing apparatus

ANELVA CORP57 citations95
US6339997B1Jan 22, 2002

Plasma processing apparatus

ANELVA CORP21 citations92
US5651826AJul 29, 1997

Plasma processing apparatus

ANELVA CORP35 citations91
US5961776AOct 5, 1999

Surface processing apparatus

ANELVA CORP15 citations72

TOYO KOHAN CO LTD

2 patents
US4194900AMar 25, 1980

Hard alloyed powder and method of making the same

TOYO KOHAN CO LTD38 citations88
US6030429AFeb 29, 2000

Hard sintered alloy

TOYO KOHAN CO LTD9 citations73

ULVAC CORP

1 patent
US6254747B1Jul 3, 2001

Magnetron sputtering source enclosed by a mirror-finished metallic cover

ULVAC CORP27 citations89