Inventor
CARLSEN KURT A
US7 patents
⚠️ This page may combine multiple inventors who share the name “CARLSEN KURT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
5 patentsUS6155289ADec 5, 2000
Method of and system for sub-atmospheric gas delivery with backflow control
IBM74 citations94
US6253783B1Jul 3, 2001
Method for sub-atmospheric gas delivery with backflow control
IBM24 citations91
US7533357B2May 12, 2009
Method and apparatus to target pre-determined spatially varying voltage variation across the area of the VLSI power distribution system using frequency domain analysis
IBM10 citations81
US7252858B2Aug 7, 2007
System and method for abating the simultaneous flow of silane and arsine
IBM1 citations60
US6821489B1Nov 23, 2004
System and method for abating the simultaneous flow of silane and arsine
IBM1 citations60