Inventor
CHEN LINUAN
US3 patents
Patents
3 patentsUS6489622B1Dec 3, 2002
Apparatus for decelerating ion beams with minimal energy contamination
ADVANCED ION BEAM TECHNOLOGY I44 citations89
US6313428B1Nov 6, 2001
Apparatus and method for reducing space charge of ion beams and wafer charging
ADVANCED ION BEAM TECHNOLOGY I39 citations89
US7687784B2Mar 30, 2010
Method and device of ion source generation
ADVANCED ION BEAM TECHNOLOGY I0 citations43