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Inventor
YOURKAS JOHN J
US
2 patents
Patents
2 patents
US6803266B2
Oct 12, 2004
Process for passivating the semiconductor-dielectric interface of a MOS device and MOS device formed thereby
IBM
9 citations
72
US6603181B2
Aug 5, 2003
MOS device having a passivated semiconductor-dielectric interface
IBM
9 citations
72