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Inventor
FANG YU-WEN
TW
3 patents
⚠️ This page may combine multiple inventors who share the name “FANG YU-WEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
2 patents
US7286896B2
Oct 23, 2007
Multi-function teach pendant for a semiconductor manufacturing environment
TAIWAN SEMICONDUCTOR MFG
7 citations
65
US6927076B2
Aug 9, 2005
Method for recovering a plasma process
TAIWAN SEMICONDUCTOR MFG
3 citations
54
UNITED MICROELECTRONICS CORP
1 patent
US6861104B2
Mar 1, 2005
Method of enhancing adhesion strength of BSG film to silicon nitride film
UNITED MICROELECTRONICS CORP
2 citations
60