Inventor
MIYAIRI MIWA
JP17 patents
Patents
17 patentsUS7323287B2Jan 29, 2008
Positive type resist composition and resist pattern formation method using same
TOKYO OHKA KOGYO CO LTD77 citations99
US7074543B2Jul 11, 2006
Positive resist composition and method of forming resist pattern from the same
TOKYO OHKA KOGYO CO LTD151 citations99
US6936400B2Aug 30, 2005
Negative resist composition
TOKYO OHKA KOGYO CO LTD40 citations92
US6406829B1Jun 18, 2002
Negative-working photoresist composition
TOKYO OHKA KOGYO CO LTD44 citations92
US7435530B2Oct 14, 2008
Positive type resist composition and resist pattern formation method using same
TOKYO OHKA KOGYO CO LTD5 citations74
US6171749B1Jan 9, 2001
Negative-working chemical-amplification photoresist composition
TOKYO OHKA KOGYO CO LTD12 citations74
US6455228B1Sep 24, 2002
Multilayered body for photolithographic patterning
TOKYO OHKA KOGYO CO LTD13 citations73
US7316888B2Jan 8, 2008
Positive type resist composition and resist pattern formation method using same
TOKYO OHKA KOGYO CO LTD2 citations63
US7316885B2Jan 8, 2008
Method of forming resist pattern, positive resist composition, and layered product
TOKYO OHKA KOGYO CO LTD6 citations63
US7316889B2Jan 8, 2008
Positive type resist composition and resist pattern formation method using same
TOKYO OHKA KOGYO CO LTD2 citations63
US6544712B1Apr 8, 2003
Negative working resist composition
TOKYO OHKA KOGYO CO LTD5 citations62
US7501221B2Mar 10, 2009
Positive type resist composition and resist pattern formation method using same
TOKYO OHKA KOGYO CO LTD0 citations52
US7390612B2Jun 24, 2008
Positive type resist composition and resist pattern formation method using same
TOKYO OHKA KOGYO CO LTD0 citations52
US7326515B2Feb 5, 2008
Positive type resist composition and resist pattern formation method using same
TOKYO OHKA KOGYO CO LTD0 citations52
US7033731B2Apr 25, 2006
Multilayered body for photolithographic patterning
TOKYO OHKA KOGYO CO LTD0 citations51
US6864036B2Mar 8, 2005
Negative-working photoresist composition
TOKYO OHKA KOGYO CO LTD1 citations51
US7276575B2Oct 2, 2007
Process for refining crude resin for resist
TOKYO OHKA KOGYO CO LTD1 citations49