Inventor
MAXIM MICHAEL A
US3 patents
Patents
3 patentsUS6087733AJul 11, 2000
Sacrificial erosion control features for chemical-mechanical polishing process
INTEL CORP77 citations92
US6572425B2Jun 3, 2003
Methods for forming microtips in a field emission device
INTEL CORP2 citations57
US6771011B2Aug 3, 2004
Design structures of and simplified methods for forming field emission microtip electron emitters
INTEL CORP0 citations47