Inventor
LE QUI T
US8 patents
Patents
8 patentsUS7109118B2Sep 19, 2006
Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures
MICROFABRICA INC45 citations96
US7288178B2Oct 30, 2007
Methods of and apparatus for making high aspect ratio microelectromechanical structures
MICROFABRICA INC30 citations92
US7524427B2Apr 28, 2009
Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
MICROFABRICA INC15 citations83
US7517462B2Apr 14, 2009
Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
MICROFABRICA INC10 citations83
US7488686B2Feb 10, 2009
Electrochemical fabrication methods including use of surface treatments to reduce overplating and/or planarization during formation of multi-layer three-dimensional structures
MICROFABRICA INC6 citations73
US7172684B2Feb 6, 2007
Methods of and apparatus for making high aspect ratio microelectromechanical structures
MICROFABRICA INC3 citations62
US10676836B2Jun 9, 2020
Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
MICROFABRICA INC0 citations51
US9546431B2Jan 17, 2017
Electrochemical fabrication methods incorporating dielectric materials and/or using dielectric substrates
MICROFABRICA INC1 citations51