Inventor
FOX ALLEN
US5 patents
⚠️ This page may combine multiple inventors who share the name “FOX ALLEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS7672110B2Mar 2, 2010
Electrostatic chuck having textured contact surface
APPLIED MATERIALS INC58 citations96
US7970483B2Jun 28, 2011
Methods and apparatus for improving operation of an electronic device manufacturing system
APPLIED MATERIALS INC8 citations82
US8003067B2Aug 23, 2011
Apparatus and methods for ambient air abatement of electronic manufacturing effluent
APPLIED MATERIALS INC6 citations55