Inventor

HARABE NOBUYUKI

JP2 patents

⚠️ This page may combine multiple inventors who share the name “HARABE NOBUYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED MASK INSPECTION TECH

1 patent

US7627164B2Dec 1, 2009

Pattern inspection method and apparatus with high-accuracy pattern image correction capability

ADVANCED MASK INSPECTION TECH2 citations57

HARABE NOBUYUKI

1 patent

US8094926B2Jan 10, 2012

Ultrafine pattern discrimination using transmitted/reflected workpiece images for use in lithography inspection system

HARABE NOBUYUKI2 citations45