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Inventor
JINBO TAKEHITO
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “JINBO TAKEHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ULVAC INC
2 patents
US9347128B2
May 24, 2016
Method for forming dielectric thin film
ULVAC INC
4 citations
67
US9593409B2
Mar 14, 2017
Dielectric film forming apparatus and method for forming dielectric film
ULVAC INC
1 citations
46
UCHIDA HIROTO
1 patent
US8168001B2
May 1, 2012
Film-forming apparatus and film-forming method
UCHIDA HIROTO
3 citations
59