Inventor

CHANG FENG-YIH

TW2 patents

⚠️ This page may combine multiple inventors who share the name “CHANG FENG-YIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHEN CHIEH-TE

1 patent

US8835324B2Sep 16, 2014

Method for forming contact holes

CHEN CHIEH-TE1 citations45

CHANG FENG-YIH

1 patent

US8293639B2Oct 23, 2012

Method for controlling ADI-AEI CD difference ratio of openings having different sizes

CHANG FENG-YIH0 citations30