Inventor

WURMBRAND ANDREAS

DE22 patents

⚠️ This page may combine multiple inventors who share the name “WURMBRAND ANDREAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WURMBRAND ANDREAS

ZEISS CARL SMT AG

Replacement apparatus for an optical element

Microlithographic projection exposure apparatus

Device for the low-deformation replaceable mounting of an optical element

Replacement apparatus for an optical element

Low-deformation support device of an optical element

Immersion lithography objective

Replacement apparatus for an optical element

ZEISS CARL SMT GMBH

Replacement apparatus for an optical element

Replacement apparatus for an optical element

Replacement apparatus for an optical element

Mirror module, in particular for a microlithographic projection exposure appararatus

ASML NETHERLANDS BV

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

HOOGENDAM CHRISTIAAN ALEXANDER

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

SORG FRANZ

Device for the low-deformation replaceable mounting of an optical element

KUGLER JENS

Replacement apparatus for an optical element

LOERING ULRICH

Projection objective of a microlithographic projection exposure apparatus

GELLRICH BERNHARD

Holding device for an optical element in an objective

KULITZKI VIKTOR

Optical arrangement in a projection exposure apparatus for EUV lithography