Inventor
BRENNAN KENNETH D
US22 patents
Patents
22 patentsUS6903918B1Jun 7, 2005
Shielded planar capacitor
TEXAS INSTRUMENTS INC69 citations98
US7397107B2Jul 8, 2008
Ferromagnetic capacitor
TEXAS INSTRUMENTS INC16 citations92
US7109838B2Sep 19, 2006
System for integrating a toroidal inductor in a semiconductor device
TEXAS INSTRUMENTS INC34 citations92
US6951812B2Oct 4, 2005
Copper transition layer for improving copper interconnection reliability
TEXAS INSTRUMENTS INC22 citations92
US6911389B2Jun 28, 2005
Self aligned vias in dual damascene interconnect, buried mask approach
TEXAS INSTRUMENTS INC24 citations92
US6693356B2Feb 17, 2004
Copper transition layer for improving copper interconnection reliability
TEXAS INSTRUMENTS INC32 citations92
US6600208B2Jul 29, 2003
Versatile system for integrated circuit containing shielded inductor
TEXAS INSTRUMENTS INC24 citations92
US5880026AMar 9, 1999
Method for air gap formation by plasma treatment of aluminum interconnects
TEXAS INSTRUMENTS INC42 citations92
US6984580B2Jan 10, 2006
Dual damascene pattern liner
TEXAS INSTRUMENTS INC29 citations91
US7436281B2Oct 14, 2008
Method to improve inductance with a high-permeability slotted plate core in an integrated circuit
TEXAS INSTRUMENTS INC9 citations84
US7118925B2Oct 10, 2006
Fabrication of a ferromagnetic inductor core and capacitor electrode in a single photo mask step
TEXAS INSTRUMENTS INC11 citations84
US6620727B2Sep 16, 2003
Aluminum hardmask for dielectric etch
TEXAS INSTRUMENTS INC18 citations84
US7250334B2Jul 31, 2007
Metal insulator metal (MIM) capacitor fabrication with sidewall spacers and aluminum cap (ALCAP) top electrode
TEXAS INSTRUMENTS INC17 citations82
US6787875B2Sep 7, 2004
Self-aligned vias in an integrated circuit structure
TEXAS INSTRUMENTS INC18 citations82
US7189615B2Mar 13, 2007
Single mask MIM capacitor and resistor with in trench copper drift barrier
TEXAS INSTRUMENTS INC18 citations81
US6465339B2Oct 15, 2002
Technique for intralevel capacitive isolation of interconnect paths
TEXAS INSTRUMENTS INC14 citations78
US5998297ADec 7, 1999
Method of etching copper or copper-doped aluminum
TEXAS INSTRUMENTS INC7 citations74
US7969274B2Jun 28, 2011
Method to improve inductance with a high-permeability slotted plate core in an integrated circuit
TEXAS INSTRUMENTS INC6 citations73
US6605536B2Aug 12, 2003
Treatment of low-k dielectric films to enable patterning of deep submicron features
TEXAS INSTRUMENTS INC9 citations73
US6548400B2Apr 15, 2003
Method of fabricating interlevel connectors using only one photomask step
TEXAS INSTRUMENTS INC11 citations73
US6246120B1Jun 12, 2001
Sidewalls for guiding the via etch
TEXAS INSTRUMENTS INC8 citations71
US6074943AJun 13, 2000
Sidewalls for guiding the via etch
TEXAS INSTRUMENTS INC15 citations71