Inventor

LIM EU JIN

US4 patents

⚠️ This page may combine multiple inventors who share the name “LIM EU JIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DIAZ ADAUTO

2 patents

US8992689B2Mar 31, 2015

Method for removing halogen-containing residues from substrate

DIAZ ADAUTO8 citations80

US8845816B2Sep 30, 2014

Method extending the service interval of a gas distribution plate

DIAZ ADAUTO8 citations80

LIM EU JIN

2 patents

US8097088B1Jan 17, 2012

Methods for processing substrates in a dual chamber processing system having shared resources

LIM EU JIN6 citations67

US8101025B2Jan 24, 2012

Method for controlling corrosion of a substrate

LIM EU JIN2 citations59