Inventor
THOMAS ALAN C
US21 patents
⚠️ This page may combine multiple inventors who share the name “THOMAS ALAN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS5953128ASep 14, 1999
Optically measurable serpentine edge tone reversed targets
IBM91 citations98
US5618751AApr 8, 1997
Method of making single-step trenches using resist fill and recess
IBM152 citations96
US6451508B1Sep 17, 2002
Plural interleaved exposure process for increased feature aspect ratio in dense arrays
IBM24 citations92
US6268907B1Jul 31, 2001
Elimination of standing waves in photoresist
IBM12 citations73
US6303275B1Oct 16, 2001
Method for resist filling and planarization of high aspect ratio features
IBM7 citations72
US6436585B1Aug 20, 2002
Method of using optical proximity effects to create electrically blown fuses with sub-critical dimension neck downs
IBM8 citations70
US6427090B1Jul 30, 2002
Requalification controller for durables
IBM9 citations68
US6594817B2Jul 15, 2003
Reticle exposure matrix
IBM6 citations61
LIGHTSCAPE MATERIALS INC
3 patentsUS9200199B1Dec 1, 2015
Inorganic red phosphor and lighting devices comprising same
LIGHTSCAPE MATERIALS INC1 citations49
US9315725B2Apr 19, 2016
Method of making EU2+ activated inorganic red phosphor
LIGHTSCAPE MATERIALS INC0 citations39
US9200198B1Dec 1, 2015
Inorganic phosphor and light emitting devices comprising same
LIGHTSCAPE MATERIALS INC0 citations39