Inventor
IVERS THOMAS H
US8 patents
Patents
8 patentsUS6252295B1Jun 26, 2001
Adhesion of silicon carbide films
IBM67 citations95
US6821890B2Nov 23, 2004
Method for improving adhesion to copper
IBM37 citations92
US6626188B2Sep 30, 2003
Method for cleaning and preconditioning a chemical vapor deposition chamber dome
IBM46 citations92
US6271595B1Aug 7, 2001
Method for improving adhesion to copper
IBM30 citations92
US6939797B2Sep 6, 2005
Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof
IBM26 citations91
US6737747B2May 18, 2004
Advanced BEOL interconnect structures with low-k PE CVD cap layer and method thereof
IBM43 citations91
US7480990B2Jan 27, 2009
Method of making conductor contacts having enhanced reliability
IBM17 citations83
US7034400B2Apr 25, 2006
Dual damascene interconnect structure using low stress fluorosilicate insulator with copper conductors
IBM0 citations48