Inventor
SMETANA PAVEL
US12 patents
⚠️ This page may combine multiple inventors who share the name “SMETANA PAVEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
10 patentsUS6626188B2Sep 30, 2003
Method for cleaning and preconditioning a chemical vapor deposition chamber dome
IBM46 citations92
US6238532B1May 29, 2001
Radio-frequency coil for use in an ionized physical vapor deposition apparatus
IBM22 citations91
US6176931B1Jan 23, 2001
Wafer clamp ring for use in an ionized physical vapor deposition apparatus
IBM28 citations91
US5061652AOct 29, 1991
Method of manufacturing a semiconductor device structure employing a multi-level epitaxial structure
IBM53 citations91
US4659423AApr 21, 1987
Semiconductor crystal growth via variable melt rotation
IBM28 citations89
US5159429AOct 27, 1992
Semiconductor device structure employing a multi-level epitaxial structure and method of manufacturing same
IBM9 citations72
US4556448ADec 3, 1985
Method for controlled doping of silicon crystals by improved float zone technique
IBM10 citations66
US5293516AMar 8, 1994
Multiprobe apparatus
IBM6 citations60
US7489494B2Feb 10, 2009
Guard wafer for semiconductor structure fabrication
IBM0 citations46
US7372689B2May 13, 2008
Guard wafer for semiconductor structure fabrication
IBM1 citations46