Inventor
CRIMINALE PHILLIP
US17 patents
Patents
17 patentsUS11837479B2Dec 5, 2023
Advanced temperature control for wafer carrier in plasma processing chamber
APPLIED MATERIALS INC6 citations84
US10366867B2Jul 30, 2019
Temperature measurement for substrate carrier using a heater element array
APPLIED MATERIALS INC5 citations83
US10440777B2Oct 8, 2019
Azimuthally tunable multi-zone electrostatic chuck
APPLIED MATERIALS INC6 citations81
US10490429B2Nov 26, 2019
Substrate carrier using a proportional thermal fluid delivery system
APPLIED MATERIALS INC2 citations71
US10820378B2Oct 27, 2020
Consolidated filter arrangement for devices in an RF environment
APPLIED MATERIALS INC2 citations70
US9872341B2Jan 16, 2018
Consolidated filter arrangement for devices in an RF environment
APPLIED MATERIALS INC3 citations70
US11929241B2Mar 12, 2024
Temperature measurement for substrate carrier using a heater element array
APPLIED MATERIALS INC0 citations62
US11361948B2Jun 14, 2022
Temperature measurement for substrate carrier using a heater element array
APPLIED MATERIALS INC0 citations62
US12272575B2Apr 8, 2025
Advanced temperature control for wafer carrier in plasma processing chamber
APPLIED MATERIALS INC0 citations61
US11615973B2Mar 28, 2023
Substrate carrier using a proportional thermal fluid delivery system
APPLIED MATERIALS INC0 citations61
US11870252B2Jan 9, 2024
Consolidated filter arrangement for devices in an RF environment
APPLIED MATERIALS INC0 citations60
US12148645B2Nov 19, 2024
Calibration jig and calibration method
APPLIED MATERIALS INC0 citations59
US11622419B2Apr 4, 2023
Azimuthally tunable multi-zone electrostatic chuck
APPLIED MATERIALS INC0 citations59
US10410900B2Sep 10, 2019
Precision screen printing with sub-micron uniformity of metallization materials on green sheet ceramic
APPLIED MATERIALS INC1 citations58
US12406865B2Sep 2, 2025
Substrate carrier with array of independently controllable heater elements
APPLIED MATERIALS INC0 citations51
US11367645B2Jun 21, 2022
Temperature tunable multi-zone electrostatic chuck
APPLIED MATERIALS INC0 citations51
US10820377B2Oct 27, 2020
Consolidated filter arrangement for devices in an RF environment
APPLIED MATERIALS INC0 citations49